Parylene and MEMS Technology

Posted by Sean Horn on Mon, Jun 18, 2012

In the past decade, the use of Parylene as a structural material in microelectromechanical systems (MEMS) devices has attracted significant attention.  Parylene C, known for its biocompatibility, is widely used in implantable medical devices.  Parylene C is also compatible with MEMS microfabrication processes. WHAT ARE MEMS? Microelectromechanical systems (MEMS) is the technology of very small [